发明名称 Piezoelectric thin-film resonator and filter using the same
摘要 A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1<a/b<1.9 is satisfied where a is a main axis of the elliptical shape, and b is a sub axis thereof.
申请公布号 US7211931(B2) 申请公布日期 2007.05.01
申请号 US20040966035 申请日期 2004.10.18
申请人 发明人
分类号 H01L41/08;H01L41/09;H01L29/82;H01L41/187;H03H9/13;H03H9/15;H03H9/17;H03H9/54;H03H9/56;H03H9/58 主分类号 H01L41/08
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