发明名称 ELECTRONIC COMPONENT AND METHOD FOR MANUFACTURING THE SAME
摘要 An electronic component includes a substrate; a piezoelectric material layer supported directly or indirectly by the substrate; a first electrode arranged on a surface of the piezoelectric material layer on an opposite side of the substrate; and a second electrode arranged on a surface of the piezoelectric material layer on the substrate side. The piezoelectric material layer is sandwiched between the first electrode and the second electrode. The first electrode has a smaller surface area than the piezoelectric material layer. A portion where the piezoelectric material layer is exposed from the first electrode includes a portion that is thinner than a thickness of the piezoelectric material layer between the first electrode and the second electrode. Thus, it is possible to configure a resonator with a higher frequency than its ordinary resonance, and it is easy to achieve an adjustment of the resonance frequency of the resonator, as well as improving the yield of the component and enabling the configuration of an electronic component that includes a plurality of resonators of different frequencies.
申请公布号 US2007090731(A1) 申请公布日期 2007.04.26
申请号 US20060564142 申请日期 2006.11.28
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 NAMBA AKIHIKO;ONISHI KEIJI;TAKEDA KATSU
分类号 B44C1/22;H01L41/00;H03H3/04;H03H9/17;H03H9/56 主分类号 B44C1/22
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