| 发明名称 |
METHOD FOR REMOVING ORGANIC ELECTROLUMINESCENT RESIDUES FROM A SUBSTRATE |
| 摘要 |
<p>Organic electroluminescent residues are removed from a substrate by reactive species generated by activation in a remote chamber of a process gas comprising a fluorine-containing gas.</p> |
| 申请公布号 |
SG131071(A1) |
申请公布日期 |
2007.04.26 |
| 申请号 |
SG20060064588 |
申请日期 |
2006.09.15 |
| 申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
JOHNSON ANDREW DAVID;MAROULIS PETER JAMES;SISTERN MARK IAN;PLISHKA MARTIN JAY |
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