| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro electronic device which removes or reduces the influence of the shape of a concave portion to an electric property and the electronic property of the electronic element of a micro electronic device having the electronic element formed in the concave portion. <P>SOLUTION: A micro electronic device comprises a substrate and a transistor. The transistor comprises a channel region in the substrate, a concave portion in the channel region, a first dielectric layer 40, and a second dielectric layer. The first dielectric layer 40 comprises a first dielectric material. The first dielectric layer is deposited on the bottom of the concave portion 14. The second dielectric layer comprises a second dielectric material. The second dielectric layer is deposited on the side wall of the concave portion. The dielectric constant of the first dielectric material is larger than the dielectric constant of the second dielectric material. A gate electrode is formed in the concave portion. The gate electrode is insulated from the channel region by the first dielectric layer and the second dielectric layer. <P>COPYRIGHT: (C)2007,JPO&INPIT |
