摘要 |
PROBLEM TO BE SOLVED: To provide a liquid discharge head which can simplify a manufacturing process and assure the reliability of a connection and to provide its manufacturing process. SOLUTION: A liquid resist is applied so that a piezoelectric element 58 may be covered on a diaphragm 56 in which the piezoelectric element 58 is installed, cured and a resist layer 98 is formed. Further, the resist layer 98 formed on its diaphragm 56 is exposed, and developed. Additionally, the resist covering the movable part 58a and the electric connecting part 58b of the piezoelectric element 58 are divided and removed, and the movable space 100 and the connection space 102 of the piezoelectric element are partitioned and formed in the resist layer 98. After this, the connection space 102 is filled up with a conductive adhesive 108, and the connection with the piezoelectric element 58 is assured. Thereby, an encapsulation is carried out with the perimeter of the piezoelectric element 58 filled with the resist, so that leakage current can be inhibited. COPYRIGHT: (C)2007,JPO&INPIT
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