| 摘要 |
PROBLEM TO BE SOLVED: To resolve inconveniences such as residues of bubbles or liquid accumulation without causing complication of a composition. SOLUTION: The fluid control valve 10 is provided with: a valve element 30 having a second diaphragm member 32 and a shaft part (a boss part 32c of the second diaphragm member 32 and a rod part33); and a body 11 operably housing the valve element 30. In the fluid control valve 10, a second fluid chamber R2 is formed along the shaft part, a pressure acting chamber R4 is formed in one side of the second diaphragm member 32, sandwiching it, and a third fluid chamber R3 is formed in the other side so as to surround the shaft part. A communication groove 27 connecting the second fluid chamber R2 and the third fluid chamber R3 is provided in a side of the shaft part opposite to an opening 24a of a discharge passage 24. COPYRIGHT: (C)2007,JPO&INPIT
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