METHOD FOR PRODUCING A THIN MAGNESIUM OXIDE LAYER

摘要

The invention relates to a method for producing thin magnesium oxide layers on a substrate. Initially, a layer made of metallic magnesium is applied to the substrate and then the magnesium layer is transformed into a magnesium oxide layer by means of oxidation, for example, by treating plasma containing oxygen ions. The inventive method enables, in particular, TMR-layer systems to be produced, wherein the insulating barrier or intermediate layer is produced according to said method. Said method enables very thin magnesium oxide layers having small thickness tolerances, to be produced.