| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical liquid applicator which can reduce the defects of a coating film formed by using a low-viscosity chemical liquid, such as of an antireflection film. SOLUTION: In the chemical liquid applicator where a pump 3, a filter 4, an air operation sackbag 5, and a discharge nozzle 6 are connected through piping 7 in this order from the supply side of the chemical liquid, a drive timing control system 18 is connected between the pump 3 and the air operation sackbag 5. At the same time the pump 3 starts the operation of sending the chemical liquid, a signal is sent to the air operation sackbag 5 through the drive timing control system 18. The air operation sackbag 5 which has received the signal starts opening operation after the delivery operation of the pump 3. COPYRIGHT: (C)2007,JPO&INPIT
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