发明名称 |
LITHOGRAPHIC APPPARATUS COMPRISING AN ELECTRICAL DISCHARGE GENERATOR AND METHOD FOR CLEANING AN ELEMENT OF A LITHOGRAPHIC APPARATUS |
摘要 |
<p>A method for cleaning elements of a lithographic apparatus, for example optical elements such as a collector mirror, includes providing a gas containing nitrogen; generating nitrogen radicals from at least part of the gas, thereby forming a radical containing gas; and providing at least part of the radical containing gas to the one or more elements of the apparatus. A lithographic apparatus includes a source and an optical element, and an electrical discharge generator arranged to generate a radio frequency discharge.</p> |
申请公布号 |
SG131060(A1) |
申请公布日期 |
2007.04.26 |
申请号 |
SG20060063077 |
申请日期 |
2006.09.12 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
RAKHIMOVA, TATYANA VICTOROVNA;BANINE, VADIM YEVGENYEVICH;IVANOV, VLADIMIR VITALEVITCH;KOSHELEV, KONSTANTIN NIKOLAEVITCH;MOORS, JOHANNES HUBERTUS JOSEPHINA;KOVALEV, ALEKSANDER SERGEEVICH;LOPAEV, DMITRIY VICTOROVICH |
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