| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for measuring a fluorine gas which enhances the response or stability of a fluorine gas densitometer and can rapidly correspond even to a change in the concentration of a fluorine gas. SOLUTION: The apparatus includes a measuring part 11 for measuring the concentration of the fluorine gas in the sample gas introduced from a measuring gas introducing route 12, a standard gas supply part 21 for supplying a standard fluorine gas, an inert gas supply part 31 for supplying an inert gas containing no fluorine gas, a gas mixing part 41 for leading out the standard fluorine gas and the inert gas through pressure adjusting means 22 and 32 and flow rate adjusting means 23 and 33 to mix both gases and a measuring gas switching means 6 for converting the gas introduced into the measuring part 11 through the measuring gas introducing route 12 to either one of the fluorine-containing mixed gas formed in the gas mixing part 41 and the sample gas introduced from a sample gas introducing route 51. COPYRIGHT: (C)2007,JPO&INPIT
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