METHOD OF FORMING METAL OXIDE FILM, METAL OXIDE FILM AND OPTICAL ELECTRONIC DEVICE

摘要

A metal oxide film; a method of forming the same; and an optical electronic device making use of the metal oxide film. There is provided a method of forming a metal oxide film, comprising the first step of mixing together an organic solvent and an organometallic compound being liquid at ordinary temperature to thereby obtain a paste; the second step of coating a base material with the paste material obtained in the first step; and the third step of after the second step, irradiating the paste applied to the base material with atmospheric pressure plasma so that while vaporizing the organic matter of the paste material, the metal element of the material is oxidized to thereby form a metal oxide film. Accordingly, metal oxide film (2) consisting of three layers is formed on base material (1), such as a glass substrate. This structure can be obtained by repeating the step of mixing together an organic solvent and an organometallic compound being liquid at ordinary temperature to thereby obtain a paste; the step of coating a base material with the paste; and the step of while vaporizing the organic matter of the paste, oxidizing the metal element.