| 摘要 |
PROBLEM TO BE SOLVED: To accurately calibrate a probe for measuring the temperature of a substrate in a substrate processing chamber. SOLUTION: The probe includes a light pipe, one end of which is inserted into the processing chamber. The other end of the light pipe is connected to a bifurcated optical fiber. A light source is optically coupled to one branch of the optical fiber, and a pyrometer is optically coupled to another branch. To self-calibrate the probe, an object of stable reflectivity, such as a gold-plated wafer, is inserted into the chamber, the light source is activated, and the intensity of light reflected from the object is measured by the pyrometer. COPYRIGHT: (C)2007,JPO&INPIT
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