发明名称 Accurate positioning of components of a optical assembly
摘要 A passive alignment technique is disclosed to facilitate accurate positioning of components of an optical assembly. In one aspect, a method includes directing light onto components of an optical assembly in which a first component includes a first pattern of marks with a first frequency and a second component includes a second pattern of marks with a second different frequency. An optical signal corresponding to the superposition of the first and second patterns is detected. Based on the detected optical signal, a determination may be made as to whether the first and second components are properly positioned with respect to one another.
申请公布号 US7209235(B2) 申请公布日期 2007.04.24
申请号 US20030616521 申请日期 2003.07.10
申请人 HYMITE A/S 发明人 BLIDEGN KRISTIAN
分类号 G01B11/00;G01B11/14;G01R31/26;G02B6/12;G02B6/26;G02B6/42;G03C5/00;G03F9/00;H01L21/66 主分类号 G01B11/00
代理机构 代理人
主权项
地址