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经营范围
发明名称
TRANSFER CHAMBER HAVING TWO WAFER SENSOR
摘要
申请公布号
KR20070042722(A)
申请公布日期
2007.04.24
申请号
KR20050098621
申请日期
2005.10.19
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
HWANG, CHUL HEE
分类号
H01L21/66;H01L21/68
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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