发明名称 |
Molecular contamination monitoring system and method |
摘要 |
A flow-through monitor for detecting molecular contamination (MC) within a fluid flow. The monitor has a diffusion chamber having an inlet port and an outlet port, and a structure for supporting a fluid flow from the inlet port to the outlet port. The structure includes a flow gap causing a diffusion of molecular contaminants into the diffusion chamber, while substantially preventing, for a rate of the fluid flow above a predetermined magnitude, particulate contaminants within the fluid from entering the diffusion chamber. A SAW device detects molecular contamination interior to the diffusion chamber. Fluid input to the flow-through monitor may be diluted by a pure fluid for extended monitor life. A system for aggregate sampling connects an ensemble manifold upstream of the flow-through monitor. A system for triggered sampling connects a sample preconcentrator downstream of the flow-through monitor. A chemically selective membrane may be located between the flow gap and the SAW. A test surface adapted to collect MC and located to sample the same fluid as the SAW may also be combined with the monitor. A chemical filter and/or heater may be located upstream of the flow-through monitor and valved to the monitor alternately to the unfiltered and unheated sample.
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申请公布号 |
US7208123(B2) |
申请公布日期 |
2007.04.24 |
申请号 |
US20020178818 |
申请日期 |
2002.06.24 |
申请人 |
PARTICLE MEASURING SYSTEMS, INC. |
发明人 |
KNOLLENBERG BRIAN A.;RODIER DANIEL;WAISANEN SCOTT |
分类号 |
B32B5/02;B32B27/04;B32B27/12;G01N1/00;G01N1/02;G01N1/40;G01N5/02;G01N7/00;G01N15/06;G01N21/00;G01N29/02;G01N29/22;G01N29/30;G01N29/32 |
主分类号 |
B32B5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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