发明名称 Creation of an electrically conducting bonding between two semi-conductor elements
摘要 A method of creating an electrically conducting bonding between a face of a first semiconductor element and a face of a second semiconductor element using heat treatment. The method applies the faces one against the other with the placing between them of at least one layer of a material configured to provide, after heat treatment, an electrically conducting bonding between the two faces. The deposited layers are chosen so that the heat treatment does not induce any reaction product between said material and the semi-conductor elements. Then, a heat treatment is carried out.
申请公布号 US7208392(B1) 申请公布日期 2007.04.24
申请号 US20000069517 申请日期 2000.09.07
申请人 SOITEC 发明人 JAUSSAUD CLAUDE;JALAGUIER ERIC;MADAR ROLAND
分类号 H01L21/02;H01L21/30;H01L21/04;H01L21/18;H01L21/76 主分类号 H01L21/02
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