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发明名称
MEMS GYROSCOPE WITH HORIZONTALLY ORIENTED DRIVE ELECTRODES
摘要
申请公布号
EP1774259(A1)
申请公布日期
2007.04.18
申请号
EP20050760966
申请日期
2005.06.17
申请人
HONEYWELL, INC.
发明人
JOHNSON, BURGESS, R.;WEBER, MARK, W.
分类号
G01C19/56;B81B3/00;G01P15/125
主分类号
G01C19/56
代理机构
代理人
主权项
地址
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