SEMICONDUCTOR MANUFACTURING APPARATUS AND A METHOD UTILIZATION LOAD LOCK CHAMBER FOR HAVING AN UV LAMP MODULE,申请号KR20040064456-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING APPARATUS AND A METHOD UTILIZATION LOAD LOCK CHAMBER FOR HAVING AN UV LAMP MODULE
摘要
申请公布号	KR100708973(B1)	申请公布日期	2007.04.18
申请号	KR20040064456	申请日期	2004.08.16
申请人		发明人
分类号	H01L21/68;H01L21/027;H01L21/3065	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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