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发明名称
ISOLATION TRENCHES FOR MEMORY DEVICES
摘要
申请公布号
EP1774586(A1)
申请公布日期
2007.04.18
申请号
EP20050766678
申请日期
2005.06.22
申请人
MICRON TECHNOLOGY, INC.
发明人
VIOLETTE, MICHAEL
分类号
H01L21/762;H01L21/8238;H01L21/8247;H01L27/115;H01L29/788
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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