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发明名称
摘要
申请公布号
JP3905279(B2)
申请公布日期
2007.04.18
申请号
JP20000024329
申请日期
2000.02.01
申请人
发明人
分类号
H01L21/8247;H01L21/316;H01L27/115;H01L29/78;H01L29/788;H01L29/792
主分类号
H01L21/8247
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