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发明名称
薄膜电晶体基板及其制造方法
摘要
本发明提供一种薄膜电晶体基板,其具有一包括一低浓度区域及处于由多晶矽制成之一通道区域之两侧的接近该低浓度区域的一源极区域/汲极区域的半导体层;于该基板上的一闸极绝缘层及一传导层,该传导层经图案化以形成一闸电极。
申请公布号
TW200715562
申请公布日期
2007.04.16
申请号
TW095124361
申请日期
2006.07.04
申请人
三星电子股份有限公司
发明人
金一坤;朴泰炯;文国哲;金镐;金京勋;金修京
分类号
H01L29/786(2006.01)
主分类号
H01L29/786(2006.01)
代理机构
代理人
陈长文;林嘉兴
主权项
地址
韩国
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