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发明名称
热处理装置
摘要
本发明之目的在于提供一种可抑制伴随被加热物之热处理所产生之生成气体或冷却生成气体而产生之所谓昇华物之泄漏的热处理装置。热处理装置含有用以对热处理室12取出放入基板之换装部6。与设置于换装部6之闸门(shutter)10邻接之位置上,设有空气喷嘴75及与排气管74连通之进气口74a。于热处理室12内产生之生成气体或昇华物藉由气帘A1遮挡,故即使开闭闸门10,亦不会泄漏至热处理装置1之外部。
申请公布号
TW200714857
申请公布日期
2007.04.16
申请号
TW095123564
申请日期
2006.06.29
申请人
爱斯佩克股份有限公司
发明人
福岛彰;矢正男
分类号
F27D7/04(2006.01);H01L21/324(2006.01)
主分类号
F27D7/04(2006.01)
代理机构
代理人
陈长文
主权项
地址
日本
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