发明名称 |
VERFAHREN UND VORRICHTUNG ZUR REINIGUNG VON SUBSTRATOBERFLÄCHEN |
摘要 |
The invention relates to a method for cleaning substrate surfaces in which the substrate (11) is brought into contact with ozone in an aqueous solution. In order to guarantee rapid and quantitative cleaning of organic substances sticking to the substrate surface, the invention proposes extensively saturating the solution with ozone under overpressure and bringing the solution, which is under overpressure, into contact with the substrate (11). |
申请公布号 |
AT357738(T) |
申请公布日期 |
2007.04.15 |
申请号 |
AT19980905311T |
申请日期 |
1998.01.19 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;INVENT GMBH - ENTWICKLUNG NEUER TECHNOLOGIEN |
发明人 |
GENENGER, BERND;MESSMANN, KLAUS |
分类号 |
B08B3/08;B08B3/10;H01L21/00;H01L21/306 |
主分类号 |
B08B3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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