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发明名称
COOLING APPARATUS FOR SEMICONDUCTOR-MANUFACTURING DEVICE
摘要
申请公布号
KR20070039797(A)
申请公布日期
2007.04.13
申请号
KR20050095089
申请日期
2005.10.10
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KOO, DAE KYOUNG
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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