| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensitive sensor element that does not vary capacitance under a constant pressure, is small, and has high versatility. <P>SOLUTION: In the pressure sensitive sensor element 1 using the piezo-dielectric effect where the capacitance varies when the dielectric material is pressurized, an antiferroelectric ceramic plate 2 or an antiferroelectric single crystal plate is used as the dielectric material. Sodium niobate is used as the antiferroelectric ceramic plate 2, and niobium is excessively mixed and burned so that the mixture ratio of sodium and niobium is 1:1.005 to 1:1.04. <P>COPYRIGHT: (C)2007,JPO&INPIT |
