发明名称 INSPECTION SIGNAL GENERATOR AND SEMICONDUCTOR INSPECTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an inspection signal generator for suppressing man-hours for design from increasing and that can be operated at a high frequency. SOLUTION: The inspection signal generator 10 includes a pattern generating section 20, including a calculation controlling section 21 for generating calculation control signals CS1, CS2 from pattern address control signals C11, C12 based on a predetermined rule, and pattern address calculators 22a, 22b for generating addresses A22a, A22b by using an address A23b output from a pattern address register 23b, based on the calculation controlling signals CS1, CS2. The pattern generating section 20 is operated and synchronized with a clock signal CLK, whose frequency is half the frequency of an inspection signal S10. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007093547(A) 申请公布日期 2007.04.12
申请号 JP20050286819 申请日期 2005.09.30
申请人 YOKOGAWA ELECTRIC CORP 发明人 SUZUKI AKIHIRO;SUZUKI HIROYASU
分类号 G01R31/3183 主分类号 G01R31/3183
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