发明名称 Electricity transmission device for vacuum chamber has transformer with fixed part connected to rotatable tubular cathode
摘要 <p>Electricity transmission device for vacuum chamber from a power supply outside a vacuum chamber (2) to at least one tubular cathode (7, 8) inside the vacuum chamber. It includes a transformer, which has a fixed part (36) connected to the tubular cathode, which can be rotated. Conducting lines (40, 41) run from the rotatable part (35) of the transformer to one of the tubular cathodes (8).</p>
申请公布号 DE202007001356(U1) 申请公布日期 2007.04.12
申请号 DE20072001356U 申请日期 2007.01.24
申请人 APPLIED MATERIALS INC. 发明人
分类号 C23C14/54;C23C14/34 主分类号 C23C14/54
代理机构 代理人
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