| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning method and a positioning device that use a piezoelectric driving body composed of a piezoelectric element, are compact and obtain fine precision. SOLUTION: A pedestal which receives a load, and piezoelectric drivers 30 and 109 which move a movable table 16 and are each composed of one leg, are unitized in one and arranged at three places on a periphery of the movable table. Accordingly, high precision that the piezoelectric drivers 30 and 109 composed of piezoelectric elements 31 have, and the high withstand load of the pedestal and the reduction in the number of piezoelectric elements 31 to a half, are obtained to make the positioning device compact and reduce the cost. Further, tips of support legs of the piezoelectric drivers are made spherical to achieve smooth positioning with fine precision. COPYRIGHT: (C)2007,JPO&INPIT |
