摘要 |
<P>PROBLEM TO BE SOLVED: To perform high-precision distance measurement by reducing measurement errors of a phase-difference sensor. <P>SOLUTION: The phase-difference sensor 13, with arranged toward an object under measurement 61, is supported rotatably in a sensor optical-axis direction by at least 180 degrees. By rotating the phase-difference sensor 13, the angle of a sensor field of view D is changed. The distance to the object under measurement 61 is accurately measured using results measured before and after the change. This allows high-precision distance measurement by reducing errors caused by characteristics variations of the phase-difference sensor. <P>COPYRIGHT: (C)2007,JPO&INPIT |