| 摘要 |
PROBLEM TO BE SOLVED: To provide a light irradiation heating method, capable of uniformly heating a substance to be processed or heating the substance so that desired physical characteristics are imparted to the substance to be processed after a heating processing, even when the physical characteristics of the substance to be treated are formed in an asymmetrical shape with respect to the shape of the substance to be processed. SOLUTION: An emissivity distribution is obtained, on the basis of the measured value of the localized physical characteristics of a substance to be processed, and a light-intensity distribution pattern on the substance to be processed is obtained (S1 and S2). Each light intensity, emitted from each emitter of the lamp unit of a light irradiation type heating apparatus realizing substantial uniformization of the temperature of the substance to be processed, is obtained previously in response to the light-intensity pattern (S3). The substance to be processed is irradiated with light, by discretely controlling the light intensities emitted from each emitter of the lamp unit, made to respond to the result obtained (S4). The substance to be processed may also be heated and processed by the light-intensity distribution pattern so that substantially uniform electrical characteristics are imparted to the substance to be processed, after the heating processing. COPYRIGHT: (C)2007,JPO&INPIT
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