| 摘要 |
PROBLEM TO BE SOLVED: To establish a measuring instrument for simultaneously measuring, through simple adjustment, chromatic aberration, coma aberration, astigmatism, and spherical aberration of an optical component which corresponds to a plurality of wavelengths, using a single device. SOLUTION: This light measuring instrument is equipped with a plurality of light sources different in wavelengths. Rays of light simultaneously outputted from the light sources are divided into reference light and measurement light for each of individual wavelengths, and superimposed on each other by being applied to an object under inspection and to referential movable mirrors 13, 14, and 15. A plurality of interference fringe images different in wavelengths can be thus formed. Wavelength selection filters 16 and 17 are used to classify the formed fringe images by wavelength, which are fetched into a personal computer. Electronic analysis of the taken-in images makes it possible to measure coma aberration, astigmatism, and spherical aberrations. Furthermore, as to chromatic aberration measurement, it is possible to calculate the chromatic aberrations from the amount of deviation of the focal distance of the object by using the measurement light of individual wavelengths. COPYRIGHT: (C)2007,JPO&INPIT
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