发明名称 HEAT TRANSFER ASSEMBLY
摘要 A heat transfer assembly having a heat spreading member sandwiched between a heat source and a heat sink is disclosed. The heat sink, the heat spreading member, and the heat source are pressed against the bottom of a substrate support plate by a bias member.
申请公布号 US2007079761(A1) 申请公布日期 2007.04.12
申请号 US20060535658 申请日期 2006.09.27
申请人 APPLIED MATERIALS, INC. 发明人 YENDLER BORIS S.;MATYUSHKIN ALEXANDER
分类号 C23C16/00;H01L21/3065;C23C16/458;C23C16/52;H01L21/68;H01L21/683 主分类号 C23C16/00
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