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发明名称
Siliciumelektrodenplatte für ein Plasmaätzen mit überlegener Haltbarkeit
摘要
申请公布号
DE112005000735(T5)
申请公布日期
2007.04.12
申请号
DE200511000735
申请日期
2005.03.30
申请人
SUMCO CORP.;MITSUBISHI MATERIALS CORP.
发明人
FUJIWARA, HIDEKI;IKEZAWA, KAZUHIRO;TAGUCHI, HIROAKI;IWAMOTO, NAOFUMI;ISHII, TOSHINORI;KOMEKYU, TAKASHI
分类号
H01L21/3065;H01J37/32;H05H1/46
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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