发明名称 Stripper
摘要 Compositions and methods useful for the removal of polymeric material and copper oxide from substrates, such as electronic devices are provided. These compositions and methods are particularly suitable for removing polymer residues from electronic devices following plasma etch processes.
申请公布号 EP1772495(A2) 申请公布日期 2007.04.11
申请号 EP20060254927 申请日期 2006.09.25
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC 发明人 AUGER, ROBERT
分类号 C09D9/00;C09K13/08;C11D7/00;C11D11/00;H01L21/306 主分类号 C09D9/00
代理机构 代理人
主权项
地址