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发明名称
STANDARD SAMPLE FOR COMPENSATING OF THE INSPECTION TOOL
摘要
申请公布号
KR20070038617(A)
申请公布日期
2007.04.11
申请号
KR20050093732
申请日期
2005.10.06
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, BYOUNG CHUL;CHIN, SOO BOK;JUNG, HO HYUNG;KIM, YOUNG GIL
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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