Method of increasing MEMS enclosure pressure using outgassing material

摘要

Semiconductor manufacturing processes include providing a first substrate having a first passivation layer disposed above a patterned top-level metal layer, and further having a second passivation layer disposed over the first passivation layer; the second passivation layer has a top surface. The processes further include forming an opening in a first portion of the second passivation layer, and the opening exposes a portion of a surface of the first passivation layer. The processes further include patterning the second and first passivation layers to expose portions of the patterned top-level metal layer and bonding a second substrate and the first substrate to each other. The bonding occurs within a temperature range in which at least the exposed portion of the first passivation layer undergoes outgassing.

主权项

1. A manufacturing method, comprising:
providing a first substrate having a first passivation layer disposed above a patterned top-level metal layer, and further having a second passivation layer disposed over the first passivation layer, the second passivation layer having a top surface; forming an opening in a first portion of the second passivation layer, the opening exposing a portion of a surface of the first passivation layer; patterning the second and first passivation layers to expose portions of the patterned top-level metal layer; and bonding a second substrate and the first substrate to each other; wherein the bonding occurs within a temperature range in which at least the exposed portion of the first passivation layer undergoes outgassing.