发明名称 |
Process for producing improved membranes |
摘要 |
The present invention relates generally to the field of chemical/mechanical polishing of substrates. In particular the invention relates to methods of producing improved membranes for use in chemical/mechanical polishing systems. The present invention provides a method of improving the properties of a flexible membrane for use in chemical/mechanical polishing, the method including subjecting the membrane to elevated temperatures.
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申请公布号 |
US7201642(B2) |
申请公布日期 |
2007.04.10 |
申请号 |
US20040544010 |
申请日期 |
2004.06.17 |
申请人 |
SYSTEMS ON SILICON MANUFACTURING CO. PTE. LTD. |
发明人 |
KOH MENG FEI;POH CHOON SIONG;GOH INN SWEE;LEONG THENG WEI;NEO TECK LEONG;WANG BING |
分类号 |
B24B1/00;B24B37/30;B24D3/22;H01L21/304 |
主分类号 |
B24B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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