PASTE COATER AND PASTE APPLYING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coater for applying paste on the top surface of a semiconductor chip positioned at the lower side, while high dimension is controlled with high accuracy. SOLUTION: The coater is provided with: a syringe 1 having a nozzle 2; a driving means 3 for driving the syringe in the horizontal direction and the vertical direction; a height reference tool 25 with the top surface formed on a reference surface to be brought into contact with the tip of the nozzle; and a laser displacement meter 16 which is provided integrally with the syringe, detects a height when the tip of the nozzle is brought into contact with the reference surface of the height reference tool as a standard height, detects the height of the top surface of the semiconductor chip to be coated with the paste as a work height so as to set the tip of the nozzle to a prescribed height relative to the top surface of the semiconductor chip to be coated with the paste based on the work height and the standard height. COPYRIGHT: (C)2007,JPO&INPIT