| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe device of multiaxial compliance which can investigate the geometrical structure of a small device, and which is gap-adjustable. SOLUTION: The probe device has a probe head (100) which applies an electrical signal to an amplifier (102), further, has the probe head (100), which possesses the end of a probe (104), and a signal/ground transport element (106). Furthermore, the probe head (100) possesses the end of the probe (104), and the signal/ground transport element (106). The signal/ground transport element (106) may present intrinsic spring characteristics. COPYRIGHT: (C)2007,JPO&INPIT
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