| 摘要 |
PROBLEM TO BE SOLVED: To obtain a droplet ejection head which can achieve the densification of a nozzle, can bring about high definition by enabling the formation of micropitch wiring accompanied by the densification of the nozzle, and has a liquid channel having a higher degree of accuracy, and a manufacturing method for the droplet ejection head. SOLUTION: A sacrificial layer 118 is superposed on the upper part of an upper electrode 54 in such a manner as to be thick enough to form a space for permitting the displacement of a piezoelectric element 46. The sacrificial layer 118 is patterned so that a bulkhead arrangement space R1 in which an ink bulkhead 140A of a bulkhead layer 140 is arranged, and a bump connecting space R2 in which a bump 64 is arranged can be formed. Additionally, the sacrificial layer 118 is superposed in the same shape as that of an ink supply passage 114 in a supply passage space R3 in which the ink supply passage 114 is formed. COPYRIGHT: (C)2007,JPO&INPIT
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