| 摘要 |
PROBLEM TO BE SOLVED: To provide a process of making a semiconductor lens that can easily form the semiconductor lens in an arbitrary shape without reference to the thickness of a semiconductor substrate. SOLUTION: The process of making the semiconductor lens includes an anode forming step of forming an anode 11 on one surface side of the semiconductor substrate 10 of an n-type silicon substrate, an anodizing step of feeding a current between a cathode 25 arranged on the other surface side of the semiconductor 10 and the anode 11 in an electrolyte B to form a porous part 14 of a region to be removed on the other surface side of the semiconductor substrate 10, and a porous part removing step of removing the porous part 14. The cathode 25 arranged opposite on the other surface side of the semiconductor substrate 10 in the anodizing step is so pattern-designed as to constitute a mask arranged between a light source 30 composed of a tungsten lamp designed to form a light intensity distribution corresponding to the desired lens shape on the other surface of the semiconductor substrate 10 and the other surface of the semiconductor substrate 10. COPYRIGHT: (C)2007,JPO&INPIT
|
