METHOD OF AND APPARATUS FOR TREATING DISCHARGE GAS

摘要

A method of treating a discharge gas containing a fluorine compound and a compound which upon solidification forms a solid serving as a catalyst poison, by which the fluorine compound contained in the discharge gas is efficiently treated without the need of a pretreatment part for removing a silicon compound through precipitation with water. The method is characterized by introducing the discharge gas into a space at a temperature at which solid precipitation does not occur, heating the discharge gas in the space in the presence of steam and oxygen at a temperature not lower than temperatures at which solid precipitation does not occur to thereby thermally decompose part of the fluorine compound, and introducing the discharge gas which has passed through the space into a catalyst part and heating the gas in this part in the presence of steam and oxygen to thereby hydrolyze the fluorine compound which has not been decomposed in the space. Also provided is an apparatus for the treatment which comprises a reaction tank for treating the fluorine compound, the tank having a space for heating the discharge gas, the space having baffle plates disposed therein and having an introduction tube open to a region kept at a temperature at which the water introduced is heated and converted to steam.