EXTREME ULTRAVIOLET RADIOACTIVE SOURCE PROVIDED WITH HIGH RADIATION OUTPUT BASED ON GAS DISCHARGE

摘要

PROBLEM TO BE SOLVED: To provide an extreme ultraviolet radioactive source provided with a high radiation output based on gas discharge.

SOLUTION: A gas adjustment unit (8) is provided for the purpose of making a predetermined control of temperature and pressure of a tin-containing working medium, and a flow of the working medium in a state of gas into a vacuum chamber (4). At least one heat insulating storage vessel (83) and a heat insulating supply piping (81) are provided to transport the gaseous tin-containing working medium from the gas adjustment unit (8) to a spare ionization unit (7) placed inside electrode housing (1, 2).

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