| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method for cutting a workpiece to be machined having various lamination structure with high accuracy. <P>SOLUTION: This laser beam machining method comprises: a step where a modified region 7 is formed in the inside of a substrate 15 by focusing the condensing point to the inside of the substrate 15 of the workpiece 1 to be machined having the substrate 15 and laminated parts 17a, 17b provided to the surface of the substrate 15 and irradiating it with a laser beam, and a cutting starting point region is formed on the inside by a prescribed distance from the laser beam incident surface of the workpiece 1 along the predetermined cut line of the workpiece 1 by this modified region 7; and a step where the workpiece 1 is cut along the predetermined cut line by applying stress to the workpiece 1 from the sides of the laminated parts 17a, 17b after forming the cutting starting point region. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
