METHOD OF IMPLANTING IONS,申请号KR20047020953-传众专利搜索

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发明名称	METHOD OF IMPLANTING IONS
摘要
申请公布号	KR100703121(B1)	申请公布日期	2007.04.05
申请号	KR20047020953	申请日期	2003.06.26
申请人		发明人
分类号	H01L21/265;H01J27/20;H01J37/08;H01J37/317;H01L21/00;H01L21/336	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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