| 摘要 |
PROBLEM TO BE SOLVED: To provide a jig for assemblying/disassemblying an attachment of a precise substrate container which can prevent the precise substrate container from being dropped in handling, or an impact from being applied in using it by a customer to break a precise substrate container or contaminate it. SOLUTION: The jig 20 for assemblying/disassemblying the attachment is mounted on the outside wall of the precise substrate container capable of containing one or a plurality of precise substrates; and has a main body 21 which can be held, and a channel 22 engaging with the junction of the attachment is formed at the end of the main body 21. COPYRIGHT: (C)2007,JPO&INPIT |
