| 摘要 |
PROBLEM TO BE SOLVED: To surely eliminate the static electricity existing on the mounting surface of a cleaning stage. SOLUTION: The method of cleaning electronic device has steps of (a) mounting a semiconductor substrate on whose surface an electronic device being formed, on the mounting surface of the stage so that the mounting surface of the stage and the rear face of the semiconductor substrate are opposed, (b) eliminating the static electricity on at least the rear surface of the semiconductor substrate by irradiating the semiconductor substrate with light using a light source provided on the mounting surface of the stage, and (c) supplying a chemical solution to the surface of the semiconductor substrate after the static electricity elimination is started for the surface of the semiconductor substrate, are comprised. COPYRIGHT: (C)2007,JPO&INPIT
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