| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source device which can be assembled in a manner that an opening part of an arc chamber as an ion generating chamber becomes surely coaxial to an opening of a draw-out electrode. SOLUTION: The ion source device is composed of an arc chamber 2, a fixing stand 7 as a base of the arc chamber, and a fastening tool 8 tightly fastening the arc chamber 2 to the fixing stand 7 in free detachment. The fastening tool 8 is composed of a plurality of fixing rods 9 having a protruded part 9a with a dimension fitted to a peripheral part of a notched hole 2b from a side part, which can be inserted into the notched hole 2b of the arc chamber 2; elastic bodies like springs 10 connected to the other end of respective fixing rods 9 and an outer peripheral part of the fixing stand 7, biasing the respective fixing rods 9 toward a connection part formed on the fixing stand 7; and regulation parts 11 regulating a maximum shifting distance L3 of the respective fixing rods 9 so that the protruded part 9a of the fixing rod 9 is fitted to the peripheral part of the notched hole 9a only when the arc chamber 2 is arranged in a prescribed attitude. In case the arc chamber 2 is not in the prescribed attitude, the attitude is to be corrected once again. COPYRIGHT: (C)2007,JPO&INPIT
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