| 摘要 |
PROBLEM TO BE SOLVED: To reduce the number of manufacturing steps of the rotor for electrostatic motor where a ring-like resistor layer is provided on the outer circumference of upper surface of each of three base films having a different radius. SOLUTION: Three base films 5a, 6a and 7a are laminated sequentially in the descending order of radius while aligning the center. When a circular mask 41 is arranged in the center on the upper surface of the uppermost base film 5a, the upper base film functions as a mask for the underlying base film. Consequently, resistor layers 5b, 6b and 7b can be formed on the outer circumference of upper surface of each base film 5a, 6a, 7a and on the upper surface of the mask 41 by single resistor layer forming process, and the number of manufacturing steps can be reduced. COPYRIGHT: (C)2007,JPO&INPIT
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