METHOD FOR PRODUCING A SENSOR ARRANGEMENT COMPRISING A MONOLITHICALLY INTEGRATED CIRCUIT

摘要

The invention relates to a method for producing a sensor arrangement comprising a monolithically integrated circuit, in addition to a sensor arrangement. Said sensor arrangement comprises a micromechanical sensor structure, wherein a first partial structure, which is associated with the sensor structure, is produced at the same time as a second partial structure which is associated with the circuit. A process variation of the first partial structure is performed at the same time as the second partial structure in order to control the structure of the sensor structure.